After baking, the wafer sheets are cooled stress-free at ambient temperature by the wafer sheet coolers. The archway design allows operating personnel to walk through the production plant without any hindrance.
Automatic sheet take-off system with cleaning burr.
Infeed control device and ejection system for the broken wafer sheets.
Quality control via corresponding sensors and automatic ejection of defective wafer sheets (e.g. missing corner on wafer sheet)
